Anisotropic diamond etching through thermochemical reaction between Ni and diamond in high-temperature water vapour

Diamond possesses excellent physical and electronic properties, and thus various applications that use diamond are under development. Additionally, the control of diamond geometry by etching technique is essential for such applications. However, conventional wet processes used for etching other mate...

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Detalles Bibliográficos
Autores principales: Nagai, Masatsugu, Nakanishi, Kazuhiro, Takahashi, Hiraku, Kato, Hiromitsu, Makino, Toshiharu, Yamasaki, Satoshi, Matsumoto, Tsubasa, Inokuma, Takao, Tokuda, Norio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5923242/
https://www.ncbi.nlm.nih.gov/pubmed/29703922
http://dx.doi.org/10.1038/s41598-018-25193-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5923242/
https://www.ncbi.nlm.nih.gov/pubmed/29703922
http://dx.doi.org/10.1038/s41598-018-25193-2

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