PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

With an aim to reduce the cost of prototype development, this paper establishes a PSPICE hybrid model for the simulation of capacitive microelectromechanical systems (MEMS) gyroscopes. This is achieved by modeling gyroscopes in different modules, then connecting them in accordance with the correspon...

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Detalles Bibliográficos
Autores principales: Su, Yan, Tong, Xin, Liu, Nan, Han, Guowei, Si, Chaowei, Ning, Jin, Li, Zhaofeng, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948506/
https://www.ncbi.nlm.nih.gov/pubmed/29597284
http://dx.doi.org/10.3390/s18041006

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948506/
https://www.ncbi.nlm.nih.gov/pubmed/29597284
http://dx.doi.org/10.3390/s18041006

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