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A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor

In this paper, a new single-device three-dimensional (3D) Hall sensor called a cross-shaped 3D Hall device is designed based on the five-contact vertical Hall device. Some of the device parameters are based on 0.18 μm BCDlite(TM) technology provided by GLOBALFOUNDRIES. Two-dimensional (2D) and 3D fi...

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Detalles Bibliográficos
Autores principales: Tang, Wei, Lyu, Fei, Wang, Dunhui, Pan, Hongbing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948623/
https://www.ncbi.nlm.nih.gov/pubmed/29614815
http://dx.doi.org/10.3390/s18041065