Integrated Optoelectronic Position Sensor for Scanning Micromirrors

Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting ang...

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Detalles Bibliográficos
Autores principales: Cheng, Xiang, Sun, Xinglin, Liu, Yan, Zhu, Lijun, Zhang, Xiaoyang, Zhou, Liang, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948664/
https://www.ncbi.nlm.nih.gov/pubmed/29587451
http://dx.doi.org/10.3390/s18040982

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948664/
https://www.ncbi.nlm.nih.gov/pubmed/29587451
http://dx.doi.org/10.3390/s18040982

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