Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach

Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on-chip testing device was designed and fabricated t...

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Detalles Bibliográficos
Autores principales: Mirzazadeh, Ramin, Eftekhar Azam, Saeed, Mariani, Stefano
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948683/
https://www.ncbi.nlm.nih.gov/pubmed/29673228
http://dx.doi.org/10.3390/s18041243

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948683/
https://www.ncbi.nlm.nih.gov/pubmed/29673228
http://dx.doi.org/10.3390/s18041243

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