Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application

MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps, including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical mechanical polishing (CMP). The effects of the process parameters of CMP and DRIE are investigated in this study. The process...

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Detalles Bibliográficos
Autores principales: Ma, Zhibo, Wang, Yinan, Shen, Qiang, Zhang, Han, Guo, Xuetao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948758/
https://www.ncbi.nlm.nih.gov/pubmed/29673221
http://dx.doi.org/10.3390/s18041240

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5948758/
https://www.ncbi.nlm.nih.gov/pubmed/29673221
http://dx.doi.org/10.3390/s18041240

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