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Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing

Dopant-segregated source/drain contacts in a p-channel Schottky-barrier metal-oxide semiconductor field-effect transistor (SB-MOSFET) require further hole Schottky barrier height (SBH) regulation toward sub-0.1 eV levels to improve their competitiveness with conventional field-effect transistors. Be...

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Autores principales: Sun, Feng, Li, Chen, Fu, Chaochao, Zhou, Xiangbiao, Luo, Jun, Zou, Wei, Qiu, Zhi-Jun, Wu, Dongping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5951317/
https://www.ncbi.nlm.nih.gov/pubmed/29565304
http://dx.doi.org/10.3390/ma11040471
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author Sun, Feng
Li, Chen
Fu, Chaochao
Zhou, Xiangbiao
Luo, Jun
Zou, Wei
Qiu, Zhi-Jun
Wu, Dongping
author_facet Sun, Feng
Li, Chen
Fu, Chaochao
Zhou, Xiangbiao
Luo, Jun
Zou, Wei
Qiu, Zhi-Jun
Wu, Dongping
author_sort Sun, Feng
collection PubMed
description Dopant-segregated source/drain contacts in a p-channel Schottky-barrier metal-oxide semiconductor field-effect transistor (SB-MOSFET) require further hole Schottky barrier height (SBH) regulation toward sub-0.1 eV levels to improve their competitiveness with conventional field-effect transistors. Because of the solubility limits of dopants in silicon, the requirements for effective hole SBH reduction with dopant segregation cannot be satisfied using mono-implantation. In this study, we demonstrate a potential solution for further SBH tuning by implementing the dual implantation of boron (B) and aluminum (Al) in combination with microwave annealing (MWA). By using such a method, not only has the lowest hole SBH ever with 0.07 eV in NiSi/n-Si contacts been realized, but also the annealing duration of MWA was sharply reduced to 60 s. Moreover, we investigated the SBH tuning mechanisms of the dual-implanted diodes with microwave annealing, including the dopant segregation, activation effect, and dual-barrier tuning effect of Al. With the selection of appropriate implantation conditions, the dual implantation of B and Al combined with the MWA technique shows promise for the fabrication of future p-channel SB-MOSFETs with a lower thermal budget.
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spelling pubmed-59513172018-05-15 Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing Sun, Feng Li, Chen Fu, Chaochao Zhou, Xiangbiao Luo, Jun Zou, Wei Qiu, Zhi-Jun Wu, Dongping Materials (Basel) Article Dopant-segregated source/drain contacts in a p-channel Schottky-barrier metal-oxide semiconductor field-effect transistor (SB-MOSFET) require further hole Schottky barrier height (SBH) regulation toward sub-0.1 eV levels to improve their competitiveness with conventional field-effect transistors. Because of the solubility limits of dopants in silicon, the requirements for effective hole SBH reduction with dopant segregation cannot be satisfied using mono-implantation. In this study, we demonstrate a potential solution for further SBH tuning by implementing the dual implantation of boron (B) and aluminum (Al) in combination with microwave annealing (MWA). By using such a method, not only has the lowest hole SBH ever with 0.07 eV in NiSi/n-Si contacts been realized, but also the annealing duration of MWA was sharply reduced to 60 s. Moreover, we investigated the SBH tuning mechanisms of the dual-implanted diodes with microwave annealing, including the dopant segregation, activation effect, and dual-barrier tuning effect of Al. With the selection of appropriate implantation conditions, the dual implantation of B and Al combined with the MWA technique shows promise for the fabrication of future p-channel SB-MOSFETs with a lower thermal budget. MDPI 2018-03-22 /pmc/articles/PMC5951317/ /pubmed/29565304 http://dx.doi.org/10.3390/ma11040471 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Sun, Feng
Li, Chen
Fu, Chaochao
Zhou, Xiangbiao
Luo, Jun
Zou, Wei
Qiu, Zhi-Jun
Wu, Dongping
Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title_full Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title_fullStr Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title_full_unstemmed Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title_short Tuning of Schottky Barrier Height at NiSi/Si Contact by Combining Dual Implantation of Boron and Aluminum and Microwave Annealing
title_sort tuning of schottky barrier height at nisi/si contact by combining dual implantation of boron and aluminum and microwave annealing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5951317/
https://www.ncbi.nlm.nih.gov/pubmed/29565304
http://dx.doi.org/10.3390/ma11040471
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