Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear....

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Detalles Bibliográficos
Autores principales: Park, Sanghoo, Choe, Wonho, Moon, Se Youn, Shi, Jian Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5951922/
https://www.ncbi.nlm.nih.gov/pubmed/29760408
http://dx.doi.org/10.1038/s41598-018-25892-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5951922/
https://www.ncbi.nlm.nih.gov/pubmed/29760408
http://dx.doi.org/10.1038/s41598-018-25892-w

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