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Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear....
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5951922/ https://www.ncbi.nlm.nih.gov/pubmed/29760408 http://dx.doi.org/10.1038/s41598-018-25892-w |