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Chemical and structural analysis on magnetic tunnel junctions using a decelerated scanning electron beam
Current information technology relies on the advancement of nanofabrication techniques. For instance, the latest computer memories and hard disk drive read heads are designed with a 12 nm node and 20 nm wide architectures, respectively. With matured nanofabrication processes, a yield of such nanoele...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5954102/ https://www.ncbi.nlm.nih.gov/pubmed/29765061 http://dx.doi.org/10.1038/s41598-018-25638-8 |