High Quality 3D Photonics using Nano Imprint Lithography of Fast Sol-gel Materials

A method for the realization of low-loss integrated optical components is proposed and demonstrated. This approach is simple, fast, inexpensive, scalable for mass production, and compatible with both 2D and 3D geometries. The process is based on a novel dual-step soft nano imprint lithography proces...

Descripción completa

Detalles Bibliográficos
Autores principales: Bar-On, Ofer, Brenner, Philipp, Siegle, Tobias, Gvishi, Raz, Kalt, Heinz, Lemmer, Uli, Scheuer, Jacob
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5959872/
https://www.ncbi.nlm.nih.gov/pubmed/29777156
http://dx.doi.org/10.1038/s41598-018-26261-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5959872/
https://www.ncbi.nlm.nih.gov/pubmed/29777156
http://dx.doi.org/10.1038/s41598-018-26261-3

Ejemplares similares