Liquid-Assisted Femtosecond Laser Precision-Machining of Silica

We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in a...

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Detalles Bibliográficos
Autores principales: Cao, Xiao-Wen, Chen, Qi-Dai, Fan, Hua, Zhang, Lei, Juodkazis, Saulius, Sun, Hong-Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5977301/
https://www.ncbi.nlm.nih.gov/pubmed/29710764
http://dx.doi.org/10.3390/nano8050287

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5977301/
https://www.ncbi.nlm.nih.gov/pubmed/29710764
http://dx.doi.org/10.3390/nano8050287

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