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Liquid-Assisted Femtosecond Laser Precision-Machining of Silica
We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in a...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5977301/ https://www.ncbi.nlm.nih.gov/pubmed/29710764 http://dx.doi.org/10.3390/nano8050287 |