Frequency Invariability of (Pb,La)(Zr,Ti)O(3) Antiferroelectric Thick-Film Micro-Cantilevers

Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb(0.97)La(0.02))(Zr(0.95)Ti(0.05))O(3) (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process...

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Detalles Bibliográficos
Autores principales: An, Kun, Jin, Xuechen, Meng, Jiang, Li, Xiao, Ren, Yifeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5981683/
https://www.ncbi.nlm.nih.gov/pubmed/29757249
http://dx.doi.org/10.3390/s18051542

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5981683/
https://www.ncbi.nlm.nih.gov/pubmed/29757249
http://dx.doi.org/10.3390/s18051542

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