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Frequency Invariability of (Pb,La)(Zr,Ti)O(3) Antiferroelectric Thick-Film Micro-Cantilevers

Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb(0.97)La(0.02))(Zr(0.95)Ti(0.05))O(3) (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process...

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Detalles Bibliográficos
Autores principales:	An, Kun, Jin, Xuechen, Meng, Jiang, Li, Xiao, Ren, Yifeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5981683/ https://www.ncbi.nlm.nih.gov/pubmed/29757249 http://dx.doi.org/10.3390/s18051542

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