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Ion Sputter Induced Interfacial Reaction in Prototypical Metal-GaN System
Contact property is now becoming to be a key factor for achieving high performance and high reliability in GaN-based III-V semiconductor devices. Energetic ion sputter, as an effective interface probe, is widely used to profile the metal/GaN contacts for interfacial analysis and process optimization...
Autores principales: | , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5986764/ https://www.ncbi.nlm.nih.gov/pubmed/29867157 http://dx.doi.org/10.1038/s41598-018-26734-5 |