Cargando…
Tunability of p- and n-channel TiO(x) thin film transistors
To acquire device-quality TiO(x) films usually needs high-temperature growth or additional post-thermal treatment. However, both processes make it very difficult to form the p-type TiO(x) even under oxygen-poor growth condition. With the aid of high energy generated by high power impulse magnetron s...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6006147/ https://www.ncbi.nlm.nih.gov/pubmed/29915301 http://dx.doi.org/10.1038/s41598-018-27598-5 |