Tunability of p- and n-channel TiO(x) thin film transistors

To acquire device-quality TiO(x) films usually needs high-temperature growth or additional post-thermal treatment. However, both processes make it very difficult to form the p-type TiO(x) even under oxygen-poor growth condition. With the aid of high energy generated by high power impulse magnetron sputtering (HIPIMS), a highly stable p-type TiO(x) film with good quality can be achieved. In this research, by varying the oxygen flow rate, p-type γ-TiO and n-type TiO(2) films were both prepared by HIPIMS. Furthermore, p- and n-type thin film transistors employing γ-TiO and TiO(2) as channel layers possess the field-effect carrier mobilities of 0.2 and 0.7 cm(2)/Vs, while their on/off current ratios are 1.7 × 10(4) and 2.5 × 10(5), respectively. The first presented p-type γ-TiO TFT is a major breakthrough for fabricating the TiO(x)-based p-n combinational devices. Additionally, our work also confirms HIPIMS offers the possibility of growing both p- and n-type conductive oxides, significantly expanding the practical usage of this technique.