Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

In this study we investigate the influence of the operation method in Kelvin probe force microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the nanoscale potential distribution in operating devices, e.g., in thin film transistors or on cross sections of functional s...

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Detalles Bibliográficos
Autores principales: Axt, Amelie, Hermes, Ilka M, Bergmann, Victor W, Tausendpfund, Niklas, Weber, Stefan A L
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2018
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6009372/
https://www.ncbi.nlm.nih.gov/pubmed/29977714
http://dx.doi.org/10.3762/bjnano.9.172

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6009372/
https://www.ncbi.nlm.nih.gov/pubmed/29977714
http://dx.doi.org/10.3762/bjnano.9.172

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