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Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography
We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical and structural properties and chemical composition of gold disc-shaped plasmonic antennas on a silicon nitride membrane fabricated by both me...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6018609/ https://www.ncbi.nlm.nih.gov/pubmed/29941880 http://dx.doi.org/10.1038/s41598-018-28037-1 |