Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical and structural properties and chemical composition of gold disc-shaped plasmonic antennas on a silicon nitride membrane fabricated by both me...

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Detalles Bibliográficos
Autores principales: Horák, Michal, Bukvišová, Kristýna, Švarc, Vojtěch, Jaskowiec, Jiří, Křápek, Vlastimil, Šikola, Tomáš
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6018609/
https://www.ncbi.nlm.nih.gov/pubmed/29941880
http://dx.doi.org/10.1038/s41598-018-28037-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6018609/
https://www.ncbi.nlm.nih.gov/pubmed/29941880
http://dx.doi.org/10.1038/s41598-018-28037-1

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