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Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical and structural properties and chemical composition of gold disc-shaped plasmonic antennas on a silicon nitride membrane fabricated by both me...

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Detalles Bibliográficos
Autores principales:	Horák, Michal, Bukvišová, Kristýna, Švarc, Vojtěch, Jaskowiec, Jiří, Křápek, Vlastimil, Šikola, Tomáš
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6018609/ https://www.ncbi.nlm.nih.gov/pubmed/29941880 http://dx.doi.org/10.1038/s41598-018-28037-1

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