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Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

This paper presents an analysis of the electrical and thermal properties of miniature transparent heaters for use in a wide range of temperature applications, from 15 K to 350 K. The heater structures were produced in transparent conducting oxide (TCO) layers: indium tin oxide (ITO) and ITO/Ag/ITO o...

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Detalles Bibliográficos
Autores principales: Pawlak, Ryszard, Lebioda, Marcin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6021818/
https://www.ncbi.nlm.nih.gov/pubmed/29874822
http://dx.doi.org/10.3390/s18061831