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Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K
This paper presents an analysis of the electrical and thermal properties of miniature transparent heaters for use in a wide range of temperature applications, from 15 K to 350 K. The heater structures were produced in transparent conducting oxide (TCO) layers: indium tin oxide (ITO) and ITO/Ag/ITO o...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6021818/ https://www.ncbi.nlm.nih.gov/pubmed/29874822 http://dx.doi.org/10.3390/s18061831 |