Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures

Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet’s ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications. However, electron heatin...

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Detalles Bibliográficos
Autores principales: Park, Sanghoo, Choe, Wonho, Kim, Holak
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6033924/
https://www.ncbi.nlm.nih.gov/pubmed/29976980
http://dx.doi.org/10.1038/s41598-018-27945-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6033924/
https://www.ncbi.nlm.nih.gov/pubmed/29976980
http://dx.doi.org/10.1038/s41598-018-27945-6

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