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Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet’s ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications. However, electron heatin...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6033924/ https://www.ncbi.nlm.nih.gov/pubmed/29976980 http://dx.doi.org/10.1038/s41598-018-27945-6 |