Electrical characterization of single nanometer-wide Si fins in dense arrays

This paper demonstrates the development of a methodology using the micro four-point probe (μ4PP) technique to electrically characterize single nanometer-wide fins arranged in dense arrays. We show that through the concept of carefully controlling the electrical contact formation process, the electri...

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Detalles Bibliográficos
Autores principales: Folkersma, Steven, Bogdanowicz, Janusz, Schulze, Andreas, Favia, Paola, Petersen, Dirch H, Hansen, Ole, Henrichsen, Henrik H, Nielsen, Peter F, Shiv, Lior, Vandervorst, Wilfried
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2018
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6036976/
https://www.ncbi.nlm.nih.gov/pubmed/30013880
http://dx.doi.org/10.3762/bjnano.9.178

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6036976/
https://www.ncbi.nlm.nih.gov/pubmed/30013880
http://dx.doi.org/10.3762/bjnano.9.178

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