Effect of Nitrogen Doping and Temperature on Mechanical Durability of Silicon Carbide Thin Films

Amorphous silicon carbide (a-SiC) films are promising solution for functional coatings intended for harsh environment due to their superior combination of physical and chemical properties and high temperature stability. However, the structural applications are limited by its brittleness. The possibl...

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Detalles Bibliográficos
Autores principales: Tomastik, Jan, Ctvrtlik, Radim, Ingr, Tomas, Manak, Jan, Opletalova, Ariana
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6041337/
https://www.ncbi.nlm.nih.gov/pubmed/29992984
http://dx.doi.org/10.1038/s41598-018-28704-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6041337/
https://www.ncbi.nlm.nih.gov/pubmed/29992984
http://dx.doi.org/10.1038/s41598-018-28704-3

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