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Effect of Nitrogen Doping and Temperature on Mechanical Durability of Silicon Carbide Thin Films
Amorphous silicon carbide (a-SiC) films are promising solution for functional coatings intended for harsh environment due to their superior combination of physical and chemical properties and high temperature stability. However, the structural applications are limited by its brittleness. The possibl...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6041337/ https://www.ncbi.nlm.nih.gov/pubmed/29992984 http://dx.doi.org/10.1038/s41598-018-28704-3 |