Thermal conductivity of amorphous SiO(2) thin film: A molecular dynamics study

Amorphous SiO(2) (a-SiO(2)) thin films are widely used in integrated circuits (ICs) due to their excellent thermal stability and insulation properties. In this paper, the thermal conductivity of a-SiO(2) thin film was systematically investigated using non-equilibrium molecular dynamics (NEMD) simula...

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Detalles Bibliográficos
Autores principales: Zhu, Wenhui, Zheng, Guang, Cao, Sen, He, Hu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6043512/
https://www.ncbi.nlm.nih.gov/pubmed/30002417
http://dx.doi.org/10.1038/s41598-018-28925-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6043512/
https://www.ncbi.nlm.nih.gov/pubmed/30002417
http://dx.doi.org/10.1038/s41598-018-28925-6

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