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Ultrafast z-scanning for high-efficiency laser micro-machining
High-throughput laser micro-machining demands precise control of the laser beam position to achieve optimal efficiency, but existing methods can be both time-consuming and cost-prohibitive. In this paper, we demonstrate a new high-throughput micro-machining technique based on rapidly scanning the la...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6060055/ https://www.ncbi.nlm.nih.gov/pubmed/30839516 http://dx.doi.org/10.1038/lsa.2017.181 |