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Ultrafast z-scanning for high-efficiency laser micro-machining

High-throughput laser micro-machining demands precise control of the laser beam position to achieve optimal efficiency, but existing methods can be both time-consuming and cost-prohibitive. In this paper, we demonstrate a new high-throughput micro-machining technique based on rapidly scanning the la...

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Detalles Bibliográficos
Autores principales: Chen, Ting-Hsuan, Fardel, Romain, Arnold, Craig B
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6060055/
https://www.ncbi.nlm.nih.gov/pubmed/30839516
http://dx.doi.org/10.1038/lsa.2017.181

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