A Review of Ion Implantation Technology for Image Sensors †

Ion implantation technology is reviewed mainly from the viewpoint of image sensors, which play a significant role in implantation technology development. Image sensors are so sensitive to metal contamination that they can detect even one metal atom per pixel. To reduce the metal contamination, the p...

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Detalles Bibliográficos
Autores principales: Teranishi, Nobukazu, Fuse, Genshu, Sugitani, Michiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068500/
https://www.ncbi.nlm.nih.gov/pubmed/30036992
http://dx.doi.org/10.3390/s18072358

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068500/
https://www.ncbi.nlm.nih.gov/pubmed/30036992
http://dx.doi.org/10.3390/s18072358

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