In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride

Lanthanum and lanthanum nitride thin films were deposited by magnetron sputtering onto silicon wafers covered by natural oxide. In situ and real-time synchrotron radiation experiments during deposition reveal that lanthanum crystallizes in the face-centred cubic bulk phase. Lanthanum nitride, howeve...

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Detalles Bibliográficos
Autores principales: Krause, Bärbel, Kuznetsov, Dmitry S., Yakshin, Andrey E., Ibrahimkutty, Shyjumon, Baumbach, Tilo, Bijkerk, Fred
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2018
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068614/
https://www.ncbi.nlm.nih.gov/pubmed/30100825
http://dx.doi.org/10.1107/S1600576718007367

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068614/
https://www.ncbi.nlm.nih.gov/pubmed/30100825
http://dx.doi.org/10.1107/S1600576718007367

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