An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low inserti...

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Detalles Bibliográficos
Autores principales: Stegner, Johannes, Gropp, Sebastian, Podoskin, Dmitry, Stehr, Uwe, Hoffmann, Martin, Hein, Matthias A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068624/
https://www.ncbi.nlm.nih.gov/pubmed/29973571
http://dx.doi.org/10.3390/s18072159

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068624/
https://www.ncbi.nlm.nih.gov/pubmed/29973571
http://dx.doi.org/10.3390/s18072159

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