Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators

MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the de...

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Detalles Bibliográficos
Autores principales: Zega, Valentina, Frangi, Attilio, Guercilena, Andrea, Gattere, Gabriele
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068836/
https://www.ncbi.nlm.nih.gov/pubmed/29973566
http://dx.doi.org/10.3390/s18072157

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068836/
https://www.ncbi.nlm.nih.gov/pubmed/29973566
http://dx.doi.org/10.3390/s18072157

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