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Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the de...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068836/ https://www.ncbi.nlm.nih.gov/pubmed/29973566 http://dx.doi.org/10.3390/s18072157 |
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author | Zega, Valentina Frangi, Attilio Guercilena, Andrea Gattere, Gabriele |
author_facet | Zega, Valentina Frangi, Attilio Guercilena, Andrea Gattere, Gabriele |
author_sort | Zega, Valentina |
collection | PubMed |
description | MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the development of MEMS resonators. Extensive investigations have addressed both the fabrication process (e.g., introducing heavy doping of the silicon) and the mechanical design (e.g., exploiting proper orientation of the device, slots, nonlinearities). In this work, starting from experimental data published in the literature, we show that a careful design can help reduce the thermal drift even when slots are inserted in the devices in order to decrease thermoelastic losses. A custom numerical code able to predict the dynamic behavior of MEMS resonators for different materials, orientations and doping levels is coupled with an evolutionary optimization algorithm and the possibility to find an optimal mechanical design is demonstrated on a tuning-fork resonator. |
format | Online Article Text |
id | pubmed-6068836 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2018 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-60688362018-08-07 Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators Zega, Valentina Frangi, Attilio Guercilena, Andrea Gattere, Gabriele Sensors (Basel) Article MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the development of MEMS resonators. Extensive investigations have addressed both the fabrication process (e.g., introducing heavy doping of the silicon) and the mechanical design (e.g., exploiting proper orientation of the device, slots, nonlinearities). In this work, starting from experimental data published in the literature, we show that a careful design can help reduce the thermal drift even when slots are inserted in the devices in order to decrease thermoelastic losses. A custom numerical code able to predict the dynamic behavior of MEMS resonators for different materials, orientations and doping levels is coupled with an evolutionary optimization algorithm and the possibility to find an optimal mechanical design is demonstrated on a tuning-fork resonator. MDPI 2018-07-04 /pmc/articles/PMC6068836/ /pubmed/29973566 http://dx.doi.org/10.3390/s18072157 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zega, Valentina Frangi, Attilio Guercilena, Andrea Gattere, Gabriele Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title | Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title_full | Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title_fullStr | Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title_full_unstemmed | Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title_short | Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators |
title_sort | analysis of frequency stability and thermoelastic effects for slotted tuning fork mems resonators |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068836/ https://www.ncbi.nlm.nih.gov/pubmed/29973566 http://dx.doi.org/10.3390/s18072157 |
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