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Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the de...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6068836/ https://www.ncbi.nlm.nih.gov/pubmed/29973566 http://dx.doi.org/10.3390/s18072157 |