Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated u...

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Detalles Bibliográficos
Autores principales: Tran, Anh Vang, Zhang, Xianmin, Zhu, Benliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6069098/
https://www.ncbi.nlm.nih.gov/pubmed/29937534
http://dx.doi.org/10.3390/s18072023

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6069098/
https://www.ncbi.nlm.nih.gov/pubmed/29937534
http://dx.doi.org/10.3390/s18072023

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