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Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity
This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated u...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6069098/ https://www.ncbi.nlm.nih.gov/pubmed/29937534 http://dx.doi.org/10.3390/s18072023 |