Experiments on MEMS Integration in 0.25 μm CMOS Process

In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts...

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Detalles Bibliográficos
Autores principales: Michalik, Piotr, Fernández, Daniel, Wietstruck, Matthias, Kaynak, Mehmet, Madrenas, Jordi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6069414/
https://www.ncbi.nlm.nih.gov/pubmed/29966375
http://dx.doi.org/10.3390/s18072111

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6069414/
https://www.ncbi.nlm.nih.gov/pubmed/29966375
http://dx.doi.org/10.3390/s18072111

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