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Chiral visible light metasurface patterned in monocrystalline silicon by focused ion beam
High refractive index makes silicon the optimal platform for dielectric metasurfaces capable of versatile control of light. Among various silicon modifications, its monocrystalline form has the weakest visible light absorption but requires a careful choice of the fabrication technique to avoid damag...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6072796/ https://www.ncbi.nlm.nih.gov/pubmed/30072737 http://dx.doi.org/10.1038/s41598-018-29977-4 |