The Phase Evolution and Physical Properties of Binary Copper Oxide Thin Films Prepared by Reactive Magnetron Sputtering

P-type binary copper oxide semiconductor films for various O(2) flow rates and total pressures (P(t)) were prepared using the reactive magnetron sputtering method. Their morphologies and structures were detected by X-ray diffraction, Raman spectrometry, and SEM. A phase diagram with Cu(2)O, Cu(4)O(3...

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Detalles Bibliográficos
Autores principales: Zheng, Weifeng, Chen, Yue, Peng, Xihong, Zhong, Kehua, Lin, Yingbin, Huang, Zhigao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6073460/
https://www.ncbi.nlm.nih.gov/pubmed/30037000
http://dx.doi.org/10.3390/ma11071253

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6073460/
https://www.ncbi.nlm.nih.gov/pubmed/30037000
http://dx.doi.org/10.3390/ma11071253

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