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The Phase Evolution and Physical Properties of Binary Copper Oxide Thin Films Prepared by Reactive Magnetron Sputtering
P-type binary copper oxide semiconductor films for various O(2) flow rates and total pressures (P(t)) were prepared using the reactive magnetron sputtering method. Their morphologies and structures were detected by X-ray diffraction, Raman spectrometry, and SEM. A phase diagram with Cu(2)O, Cu(4)O(3...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6073460/ https://www.ncbi.nlm.nih.gov/pubmed/30037000 http://dx.doi.org/10.3390/ma11071253 |