AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry...

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Detalles Bibliográficos
Autores principales: Miguel, Jose Angel, Lechuga, Yolanda, Martinez, Mar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082281/
https://www.ncbi.nlm.nih.gov/pubmed/30424275
http://dx.doi.org/10.3390/mi9070342

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082281/
https://www.ncbi.nlm.nih.gov/pubmed/30424275
http://dx.doi.org/10.3390/mi9070342

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