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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry...

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Detalles Bibliográficos
Autores principales: Miguel, Jose Angel, Lechuga, Yolanda, Martinez, Mar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082281/
https://www.ncbi.nlm.nih.gov/pubmed/30424275
http://dx.doi.org/10.3390/mi9070342
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author Miguel, Jose Angel
Lechuga, Yolanda
Martinez, Mar
author_facet Miguel, Jose Angel
Lechuga, Yolanda
Martinez, Mar
author_sort Miguel, Jose Angel
collection PubMed
description Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors.
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spelling pubmed-60822812018-11-01 AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications Miguel, Jose Angel Lechuga, Yolanda Martinez, Mar Micromachines (Basel) Article Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors. MDPI 2018-07-06 /pmc/articles/PMC6082281/ /pubmed/30424275 http://dx.doi.org/10.3390/mi9070342 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Miguel, Jose Angel
Lechuga, Yolanda
Martinez, Mar
AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title_full AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title_fullStr AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title_full_unstemmed AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title_short AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
title_sort afm-based characterization method of capacitive mems pressure sensors for cardiological applications
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082281/
https://www.ncbi.nlm.nih.gov/pubmed/30424275
http://dx.doi.org/10.3390/mi9070342
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