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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6082281/ https://www.ncbi.nlm.nih.gov/pubmed/30424275 http://dx.doi.org/10.3390/mi9070342 |