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Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
During the fabrication of metal/polymer bilayer gratings by nanoimprint lithography, adhesion and friction forces at the interfaces can deform and damage the transferred pattern of the bilayer grating during the demoulding process. To improve the quality of bilayer gratings, the effects of the aspec...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6109169/ https://www.ncbi.nlm.nih.gov/pubmed/30143718 http://dx.doi.org/10.1038/s41598-018-31194-y |