Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting

During the fabrication of metal/polymer bilayer gratings by nanoimprint lithography, adhesion and friction forces at the interfaces can deform and damage the transferred pattern of the bilayer grating during the demoulding process. To improve the quality of bilayer gratings, the effects of the aspec...

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Autores principales: Zheng, Xu, Wang, Qing, Zhang, Rui, Ma, Lijun, Luan, Jinjin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6109169/
https://www.ncbi.nlm.nih.gov/pubmed/30143718
http://dx.doi.org/10.1038/s41598-018-31194-y
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author Zheng, Xu
Wang, Qing
Zhang, Rui
Ma, Lijun
Luan, Jinjin
author_facet Zheng, Xu
Wang, Qing
Zhang, Rui
Ma, Lijun
Luan, Jinjin
author_sort Zheng, Xu
collection PubMed
description During the fabrication of metal/polymer bilayer gratings by nanoimprint lithography, adhesion and friction forces at the interfaces can deform and damage the transferred pattern of the bilayer grating during the demoulding process. To improve the quality of bilayer gratings, the effects of the aspect ratio and metal layer thickness on deformation and stress during the demoulding process in the nanoimprinting of bilayer gratings were investigated. This information was used to determine the optimal grating parameters. The results for the von Mises stress and deformation of bilayer gratings are discussed in detail. The effects of the aspect ratio and metal layer thickness on the grating quality are then considered.
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spelling pubmed-61091692018-08-31 Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting Zheng, Xu Wang, Qing Zhang, Rui Ma, Lijun Luan, Jinjin Sci Rep Article During the fabrication of metal/polymer bilayer gratings by nanoimprint lithography, adhesion and friction forces at the interfaces can deform and damage the transferred pattern of the bilayer grating during the demoulding process. To improve the quality of bilayer gratings, the effects of the aspect ratio and metal layer thickness on deformation and stress during the demoulding process in the nanoimprinting of bilayer gratings were investigated. This information was used to determine the optimal grating parameters. The results for the von Mises stress and deformation of bilayer gratings are discussed in detail. The effects of the aspect ratio and metal layer thickness on the grating quality are then considered. Nature Publishing Group UK 2018-08-24 /pmc/articles/PMC6109169/ /pubmed/30143718 http://dx.doi.org/10.1038/s41598-018-31194-y Text en © The Author(s) 2018 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Zheng, Xu
Wang, Qing
Zhang, Rui
Ma, Lijun
Luan, Jinjin
Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title_full Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title_fullStr Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title_full_unstemmed Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title_short Effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
title_sort effects of aspect ratio and metal layer thickness on demoulding of metal/polymer bilayer gratings during nanoimprinting
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6109169/
https://www.ncbi.nlm.nih.gov/pubmed/30143718
http://dx.doi.org/10.1038/s41598-018-31194-y
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