A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leadi...

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Detalles Bibliográficos
Autores principales: Shi, Xiaoqing, Lu, Yulan, Xie, Bo, Li, Yadong, Wang, Junbo, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111385/
https://www.ncbi.nlm.nih.gov/pubmed/30071610
http://dx.doi.org/10.3390/s18082494

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111385/
https://www.ncbi.nlm.nih.gov/pubmed/30071610
http://dx.doi.org/10.3390/s18082494

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