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A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leadi...

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Autores principales: Shi, Xiaoqing, Lu, Yulan, Xie, Bo, Li, Yadong, Wang, Junbo, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111385/
https://www.ncbi.nlm.nih.gov/pubmed/30071610
http://dx.doi.org/10.3390/s18082494
_version_ 1783350648841961472
author Shi, Xiaoqing
Lu, Yulan
Xie, Bo
Li, Yadong
Wang, Junbo
Chen, Deyong
Chen, Jian
author_facet Shi, Xiaoqing
Lu, Yulan
Xie, Bo
Li, Yadong
Wang, Junbo
Chen, Deyong
Chen, Jian
author_sort Shi, Xiaoqing
collection PubMed
description This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leading to stress buildup of the resonator under electrostatic excitation with a corresponding shift of the resonant frequency detected piezoresistively. The proposed microsensor was fabricated by simplified SOI-MEMS technologies and characterized by both open-loop and closed-loop circuits, producing a quality factor higher than 10,000, a sensitivity of 79.44 Hz/kPa and an accuracy rate of over 0.01% F.S. In comparison to the previously reported resonant piezoresistive sensors, the proposed device used single-crystal silicon as piezoresistors, which was featured with low DC biased voltages, simple sensing structures and fabrication steps. In addition, the two double-ended tuning forks were used as resonators, producing high quality factors and differential outputs, which further improved the sensor performances.
format Online
Article
Text
id pubmed-6111385
institution National Center for Biotechnology Information
language English
publishDate 2018
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-61113852018-08-30 A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection Shi, Xiaoqing Lu, Yulan Xie, Bo Li, Yadong Wang, Junbo Chen, Deyong Chen, Jian Sensors (Basel) Article This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leading to stress buildup of the resonator under electrostatic excitation with a corresponding shift of the resonant frequency detected piezoresistively. The proposed microsensor was fabricated by simplified SOI-MEMS technologies and characterized by both open-loop and closed-loop circuits, producing a quality factor higher than 10,000, a sensitivity of 79.44 Hz/kPa and an accuracy rate of over 0.01% F.S. In comparison to the previously reported resonant piezoresistive sensors, the proposed device used single-crystal silicon as piezoresistors, which was featured with low DC biased voltages, simple sensing structures and fabrication steps. In addition, the two double-ended tuning forks were used as resonators, producing high quality factors and differential outputs, which further improved the sensor performances. MDPI 2018-08-01 /pmc/articles/PMC6111385/ /pubmed/30071610 http://dx.doi.org/10.3390/s18082494 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Shi, Xiaoqing
Lu, Yulan
Xie, Bo
Li, Yadong
Wang, Junbo
Chen, Deyong
Chen, Jian
A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title_full A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title_fullStr A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title_full_unstemmed A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title_short A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
title_sort resonant pressure microsensor based on double-ended tuning fork and electrostatic excitation/piezoresistive detection
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111385/
https://www.ncbi.nlm.nih.gov/pubmed/30071610
http://dx.doi.org/10.3390/s18082494
work_keys_str_mv AT shixiaoqing aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT luyulan aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT xiebo aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT liyadong aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT wangjunbo aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT chendeyong aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT chenjian aresonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT shixiaoqing resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT luyulan resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT xiebo resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT liyadong resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT wangjunbo resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT chendeyong resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection
AT chenjian resonantpressuremicrosensorbasedondoubleendedtuningforkandelectrostaticexcitationpiezoresistivedetection