A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperatu...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Chen, Sun, Boshan, Xue, Yanan, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111589/
https://www.ncbi.nlm.nih.gov/pubmed/30110982
http://dx.doi.org/10.3390/s18082676

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6111589/
https://www.ncbi.nlm.nih.gov/pubmed/30110982
http://dx.doi.org/10.3390/s18082676

Ejemplares similares